Segregation and evaporation behaviors of aluminum and...

Segregation and evaporation behaviors of aluminum and calcium in silicon during solidification process induced by electron beam

Jiang, Dachuan, Shi, Shuang, Tan, Yi, Noor ul Huda Khan Asghar, H M, Qin, Shiqiang
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Volume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/3/035013
Date:
March, 2015
File:
PDF, 1.21 MB
english, 2015
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