![](/img/cover-not-exists.png)
Segregation and evaporation behaviors of aluminum and calcium in silicon during solidification process induced by electron beam
Jiang, Dachuan, Shi, Shuang, Tan, Yi, Noor ul Huda Khan Asghar, H M, Qin, ShiqiangVolume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/3/035013
Date:
March, 2015
File:
PDF, 1.21 MB
english, 2015