SiC Vertical DACFET (Vertical Delta-Doped Accumulation...

Materials Science Forum 2002 Vol. 389-393

SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET)

Kusumoto, Osamu, Yokogawa, Toshiya, Yamashita, Kenya, Takahashi, Kunimasa, Kitabatake, Makoto, Uchida, Masao, Miyanaga, Ryouko
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Volume:
389-393
Year:
2002
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.389-393.1211
File:
PDF, 318 KB
2002
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