Impurity Behavior during Si Single Crystal Growth from the...

Impurity Behavior during Si Single Crystal Growth from the Melt

Izumi, T., Morita, H., Fujiwara, T., Fujiwara, H., Inami, S.
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.109
File:
PDF, 344 KB
1995
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