Defect Engineering in Ion Beam Synthesis of SiC and SiO2 in...

Solid State Phenomena 2005 Vol. 108-109

Defect Engineering in Ion Beam Synthesis of SiC and SiO2 in Si

Kögler, R., Mücklich, A., Kaschny, J.R., Reuther, H., Eichhorn, F., Hutter, H., Skorupa, Wolfgang
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.321
File:
PDF, 976 KB
english, 2005
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