Modification of Low-K SiCOH Film Porosity by a HF Solution

Solid State Phenomena 2001 Vol. 76-77

Modification of Low-K SiCOH Film Porosity by a HF Solution

Shamiryan, Denis, Baklanov, Mikhail R., Vereecke, Guy, Vanhaelemeersch, Serge, Maex, Karen
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Volume:
76-77
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.76-77.135
File:
PDF, 338 KB
2001
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