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Comparison of External Gettering Efficiency of Phosphorus Diffusion, Aluminium-Silicon Alloying and Helium Implantation in Silicon Wafers
Gay, N., Martinuzzi, SantoVolume:
57-58
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.115
File:
PDF, 614 KB
1997