Full Si Wafer Conversion into Bulk 3C-SiC

Leycuras, André, Tottereau, Olivier, Vicente, Patrice, Falkovsky, L.A., Girard, P., Camassel, Jean

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Volume:

389-393

Year:

2002

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.389-393.147

File:

PDF, 406 KB

2002

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