Impact of Phosphorus Diffusion on the Contamination Level of Dislocations in Deformed Float Zone Silicon as Studied by Beam Injection Techniques
Knobloch, K., Kittler, Martin, Seifert, Winfried, Simon, J.J., Périchaud, IsabelleVolume:
63-64
Year:
1998
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.63-64.105
File:
PDF, 594 KB
english, 1998