Precipitates in Antimony Implanted Silicon

Materials Science Forum 1995 Vol. 196-201

Precipitates in Antimony Implanted Silicon

Kikuchi, Yoshio, Uesugi, F., Kaszczyszyn, S., Kase, Masataka, Yoshida, M., Watanabe, K., Hashimoto, I.
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1871
File:
PDF, 589 KB
1995
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