Hydrogen Redistribution and Void Formation in Hydrogen...

Solid State Phenomena 2002 Vol. 82-84

Hydrogen Redistribution and Void Formation in Hydrogen Plasma Treated Czochralski Silicon

Ulyashin, Alexander G., Job, Reinhart, Fahrner, Wolfgang R., Grambole, Dieter, Herrmann, Folker
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Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.315
File:
PDF, 392 KB
2002
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