Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron
Jablonski, J., Shen, Bo, Mchedlidze, Teimuraz, Imai, M., Sumino, KojiVolume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1859
File:
PDF, 451 KB
1995