Strain Measurements on Nitrogen Implanted 4H-SiC

Materials Science Forum 2011 / 3 Vol. 679-680

Strain Measurements on Nitrogen Implanted 4H-SiC

Amigou, Matthieu, Beaufort, Marie France, Declémy, Alain, Leclerc, Stephanie, Barbot, Jean François
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Volume:
679-680
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.679-680.185
Date:
March, 2011
File:
PDF, 335 KB
english, 2011
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