Selective SiGe Etching Formed by Localized Ge Implantation...

Solid State Phenomena 2005 Vol. 108-109

Selective SiGe Etching Formed by Localized Ge Implantation on SOI

Bourdon, Helene, Fenouillet-Béranger, Claire, Gallon, Claire, Coronel, Philippe, Lenoble, Damien
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.439
File:
PDF, 746 KB
english, 2005
Conversion to is in progress
Conversion to is failed