Oxygen Gettering on Buried Layers at Post-Implantation...

Solid State Phenomena 1997 Vol. 57-58

Oxygen Gettering on Buried Layers at Post-Implantation Annealing of Hydrogen Implanted Czochralski Silicon

Job, Reinhart, Fahrner, Wolfgang R., Ulyashin, Alexander G., Bumay, Yu.A., Ivanov, A.I., Palmetshofer, L.
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Volume:
57-58
Year:
1997
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.57-58.91
File:
PDF, 385 KB
1997
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