Improved Measurement of Carbon in Poly- and CZ Crystal...

Solid State Phenomena 2005 Vol. 108-109

Improved Measurement of Carbon in Poly- and CZ Crystal Silicon by Means of Low Temperature FTIR

Porrini, M., Crössmann, Ivo, Pretto, M.G., Scala, R., Wolf, Reinhard
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.591
File:
PDF, 320 KB
english, 2005
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