Defect Engineering and Prevention of Impurity Gettering at...

Solid State Phenomena 2002 Vol. 82-84

Defect Engineering and Prevention of Impurity Gettering at RP/2 in Ion-Implanted Silicon

Kögler, R., Peeva, A., Kaschny, J., Skorupa, Wolfgang, Hutter, H.
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Volume:
82-84
Year:
2002
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.82-84.399
File:
PDF, 494 KB
2002
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