Particle – Wafer Interactions in Semiaqueous Silicon...

Solid State Phenomena 2009 Vol. 145-146

Particle – Wafer Interactions in Semiaqueous Silicon Cleaning Systems

Hupka, Lukasz, Nalaskowski, Jakub, Sinha, Nishant, Greeley, Joseph N., Clark, Zak, Du, Hao, Johnson, William P., Miller, Jan D.
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Volume:
145-146
Year:
2009
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.145-146.77
File:
PDF, 2.41 MB
english, 2009
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