Determination of Effective Diffusion Coefficient of Copper...

Solid State Phenomena 2005 Vol. 108-109

Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside

Shabani, Mohammad B., Hirano, K., Shiina, Y., Kihara, T., Shingyoji, T.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.385
File:
PDF, 2.47 MB
english, 2005
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