Screening Effect of Binding of P-Si-H Complex in Silicon

Screening Effect of Binding of P-Si-H Complex in Silicon

Fukata, N., Fujimura, S., Murakami, Kenji
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.873
File:
PDF, 327 KB
1995
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