Gettering Mechanism of Cu in Silicon Calculated from First...

Solid State Phenomena 2005 Vol. 108-109

Gettering Mechanism of Cu in Silicon Calculated from First Principles

Matsukawa, Kazuhito, Hattori, Nobusuke, Maegawa, Shigeto, Shirai, Koun, Katayama-Yoshida, Hiroshi
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.115
File:
PDF, 430 KB
english, 2005
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