Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors
Boehringer, M., Pillion, J.E., Erdmann, V., Rygula, M., Winz, K., Brauchle, P., Aquino, D., Zhang, H., Zahka, Joseph, Zielonka, G., Hauber, J.Volume:
76-77
Year:
2001
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.76-77.279
File:
PDF, 341 KB
2001