µ-Raman Investigations on Hydrogen Gettering in Hydrogen...

Solid State Phenomena 2005 Vol. 108-109

µ-Raman Investigations on Hydrogen Gettering in Hydrogen Implanted and Hydrogen Plasma Treated Czochralski Silicon

Düngen, Wolfgang, Job, Reinhart, Ma, Yue, Huang, Yue Long, Fahrner, Wolfgang R., Keller, L.O., Horstmann, J.T.
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Volume:
108-109
Year:
2005
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.108-109.91
File:
PDF, 398 KB
english, 2005
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