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Effect of oxygen pressure and laser fluence during pulsed laser deposition of TiO2 on MTOS (Metal–TiO2–SiO2–Si) capacitor characteristics
Roy Paily, Amitava DasGupta, Nandita DasGupta, Tapas Ganguli, Lalit M. KukrejaVolume:
462-463
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.05.020
File:
PDF, 329 KB
english, 2004