Sub-100 nm MOSFET fabrication with low temperature resist trimming process
Shajan Mathew, Ranganathan Nagarajan, L.K. Bera, Feng Han Hua, Du An Yan, N. BalasubramanianVolume:
462-463
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.021
File:
PDF, 420 KB
english, 2004