Effects of preannealing on the diffusion barrier properties...

Effects of preannealing on the diffusion barrier properties for ultrathin W–Si–N thin film

Xin-Ping Qu, Hua Lu, Tao Peng, Guo-Ping Ru, Bing-Zong Li
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Volume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.023
File:
PDF, 544 KB
english, 2004
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