Investigation of electrical properties of furnace grown...

Thin Solid Films 2004 Vol. 462-463; Iss. none

Investigation of electrical properties of furnace grown gate oxide on strained-Si

L.K. Bera, Shajan Mathew, N. Balasubramanian, C. Leitz, G. Braithwaite, F. Singaporewala, J. Yap, J. Carlin, T. Langdo, T. Lochtefeld, M. Currie, R. Hammond, J. Fiorenza, H. Badawi, M. Bulsara
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Volume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.028
File:
PDF, 450 KB
english, 2004
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