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Effect of annealing on the composition and structure of HfO2 and nitrogen-incorporated HfO2
Chia Ching Yeo, Moon Sig Joo, Byung Jin Cho, Sung Jin WhangVolume:
462-463
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.05.030
File:
PDF, 519 KB
english, 2004