The impact of etch-stop layer for borderless contacts on...

The impact of etch-stop layer for borderless contacts on deep submicron CMOS device performance—a comparative study

H. Liao, P.S. Lee, L.N.L. Goh, H. Liu, J.L. Sudijono, Q. Elgin, C. Sanford
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Volume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.035
File:
PDF, 448 KB
english, 2004
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