Characterization and performance of dielectric diffusion...

Characterization and performance of dielectric diffusion barriers for Cu metallization

Zhe Chen, K. Prasad, C.Y. Li, S.S. Su, D. Gui, P.W. Lu, X. He, S. Balakumar
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Volume:
462-463
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.036
File:
PDF, 391 KB
english, 2004
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