Bonding structures of silicon oxynitride prepared by...

Bonding structures of silicon oxynitride prepared by oxidation of Si-rich silicon nitride

M.C. Poon, C.W. Kok, H. Wong, P.J. Chan
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
462-463
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.043
File:
PDF, 240 KB
english, 2004
Conversion to is in progress
Conversion to is failed