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Challenges of pattern transfer for ultra-low-k OSG film Aurora™ULK
Vladimir Bliznetsov, May Lee Chua, M.-M. Roy, N. SinghVolume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.044
File:
PDF, 323 KB
english, 2004