Impact of barrier metal on electrical performance of Cu/low...

Impact of barrier metal on electrical performance of Cu/low K (Black Diamond™) in 0.13μm dual damascene interconnection

H.Y. Li, C.Y. Li, Y.J. Su, C.F. Tsang
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.052
File:
PDF, 568 KB
english, 2004
Conversion to is in progress
Conversion to is failed