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Glass-to-glass anodic bonding process and electrostatic force
J. Wei, S.M.L. Nai, C.K. Wong, L.C. LeeVolume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.067
File:
PDF, 269 KB
english, 2004