Microstructural characterization of low dielectric silica...

Microstructural characterization of low dielectric silica xerogel film

Z.W. He, C.M. Zhen, X.Q. Liu, W. Lan, D.Y. Xu, Y.Y. Wang
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Volume:
462-463
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.068
File:
PDF, 381 KB
english, 2004
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