Comparative study of Ta, TaN and Ta/TaN bi-layer barriers...

Thin Solid Films 2004 Vol. 462-463; Iss. none

Comparative study of Ta, TaN and Ta/TaN bi-layer barriers for Cu-ultra low-k porous polymer integration

L.Y. Yang, D.H. Zhang, C.Y. Li, P.D. Foo
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Volume:
462-463
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.tsf.2004.05.070
File:
PDF, 418 KB
english, 2004
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