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Adhesion studies of low-k silsesquioxane
Yao-Yi Cheng, Jiuq Yi Kan, I-Shun LinVolume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.085
File:
PDF, 476 KB
english, 2004