Effect of surface treatment on dielectric leakage and...

Effect of surface treatment on dielectric leakage and breakdown of copper damascene interconnects

V.C. Ngwan, Chunxiang Zhu, Ahila Krishnamoorthy
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Volume:
462-463
Year:
2004
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2004.05.093
File:
PDF, 340 KB
english, 2004
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