Effect of ramp rate on dielectric breakdown in CU–SiOC...

Effect of ramp rate on dielectric breakdown in CU–SiOC interconnects

K.H. Cheng, Ahila Krishnamoorthy
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Volume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.097
File:
PDF, 407 KB
english, 2004
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