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Ni(Pt) alloy silicidation on (100) Si and poly-silicon lines
K.L. Pey, P.S. Lee, D. MangelinckVolume:
462-463
Year:
2004
Language:
english
Pages:
9
DOI:
10.1016/j.tsf.2004.05.098
File:
PDF, 1.26 MB
english, 2004