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Characterization of the junction leakage of Ti-capped Ni-silicided junctions
N.G. Toledo, P.S. Lee, K.L. PeyVolume:
462-463
Year:
2004
Language:
english
Pages:
7
DOI:
10.1016/j.tsf.2004.05.099
File:
PDF, 925 KB
english, 2004