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Wet etching characteristics and surface morphology evaluation of MOCVD grown HfO2 film
M. Balasubramanian, L.K. Bera, Shajan Mathew, N. Balasubramanian, Vanissa Lim, M.S. Joo, B.J. ChoVolume:
462-463
Year:
2004
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2004.05.121
File:
PDF, 378 KB
english, 2004