TDS and RB Studies of Ar Implanted to Si

Materials Science Forum 1995 Vol. 196-201

TDS and RB Studies of Ar Implanted to Si

Hanada, R., Saito, S., Nagata, S., Yamaguchi, S.
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Volume:
196-201
Year:
1995
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.196-201.1375
File:
PDF, 320 KB
1995
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