Characterization of metal-induced lateral crystallization...

Thin Solid Films 2006 Vol. 508; Iss. 1-2

Characterization of metal-induced lateral crystallization of amorphous SiGe on insulating film

Masaru Itakura, Syunji Masumori, Tomohisa Ohta, Yoshitsugu Tomokiyo, Noriyuki Kuwano, Hiroshi Kanno, Taizoh Sadoh, Masanobu Miyao
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Volume:
508
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.06.102
File:
PDF, 216 KB
english, 2006
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