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Local wet-oxidation characteristic of strained-Si/SiGe-on-insulator
M. Nishisaka, O. Shirata, D. Sakamoto, T. Enokida, H. Hagino, T. AsanoVolume:
508
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.06.107
File:
PDF, 337 KB
english, 2006