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Fabrication and characterization of strained Si1−yCy n-MOSFETs grown by Hot Wire Cell method
Hanae Ishihara, Tatsuro Watahiki, Akira Yamada, Makoto KonagaiVolume:
508
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.07.337
File:
PDF, 177 KB
english, 2006