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Structural and electrical evaluation for strained Si/SiGe on insulator
Dong Wang, Seiichiro Ii, Ken-ichi Ikeda, Hideharu Nakashima, Masaharu Ninomiya, Masahiko Nakamae, Hiroshi NakashimaVolume:
508
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.07.338
File:
PDF, 289 KB
english, 2006