Suppression of atomic exchange between Ge and Si during...

Suppression of atomic exchange between Ge and Si during germane adsorption on Si(001) using atomically flat surface

Yuzuru Narita, Takeshi Murata, Maki Suemitsu
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Volume:
508
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2005.08.387
File:
PDF, 214 KB
english, 2006
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