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Suppression of atomic exchange between Ge and Si during germane adsorption on Si(001) using atomically flat surface
Yuzuru Narita, Takeshi Murata, Maki SuemitsuVolume:
508
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2005.08.387
File:
PDF, 214 KB
english, 2006