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Epitaxy solutions for Ge MOS technology
F.E. Leys, R. Bonzom, R. Loo, O. Richard, B. De Jaeger, J. Van Steenbergen, K. Dessein, T. Conard, J. Rip, H. Bender, W. Vandervorst, M. Meuris, M. CaymaxVolume:
508
Year:
2006
Language:
english
Pages:
5
DOI:
10.1016/j.tsf.2005.08.411
File:
PDF, 217 KB
english, 2006