Direct formation of strained Si on insulator by laser...

Direct formation of strained Si on insulator by laser annealing

Isao Tsunoda, Ryo Matsuura, Masanori Tanaka, Hajime Watakabe, Toshiyuki Sameshima, Masanobu Miyao
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Volume:
508
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2005.08.415
File:
PDF, 153 KB
english, 2006
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