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Direct formation of strained Si on insulator by laser annealing
Isao Tsunoda, Ryo Matsuura, Masanori Tanaka, Hajime Watakabe, Toshiyuki Sameshima, Masanobu MiyaoVolume:
508
Year:
2006
Language:
english
Pages:
3
DOI:
10.1016/j.tsf.2005.08.415
File:
PDF, 153 KB
english, 2006