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Local strain in SiGe/Si heterostructures analyzed by X-ray microdiffraction
Shogo Mochizuki, Akira Sakai, Noriyuki Taoka, Osamu Nakatsuka, Shingo Takeda, Shigeru Kimura, Masaki Ogawa, Shigeaki ZaimaVolume:
508
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.tsf.2005.08.417
File:
PDF, 577 KB
english, 2006